M Tek provides remanufactured
wet process equipment, spare parts and service to the
semiconductor and disk drive industry
- worldwide.

SEMITOOL SPARE PARTS
 
Description Part Number
Image
Price

Door Safe Microswitch

12-422100

 

Call for pricing

Drain Tubing (pre-cut)

08-20021s

Call for pricing

Ferrofluidic Fluid (for #34)

14-100070

Call for pricing

Grommets (Drain)

09-200220

Call for pricing

Heater Blanket, 1 T-Stat 230F

09-510100

Call for pricing

Heater Blanket, 290W, No T-stats

09-500100

Call for pricing

Heater Blanket, w/ Dual T Stats

09-520100

Call for pricing

Heater Cartridge 375W 120V

03-163100

Call for pricing

Hub, 260/270 Pin Type

03-122100

Call for pricing

Motor, ½ HP Direct Drive90VDC

07-211200

Call for pricing

Motor, ½ HP Brushless 120 VD C (230VAC)

07-211000

Call for pricing

Pressure Switch

12-411000

Call for pricing

Resistivity Probe (101, 102)

06-500100

Call for pricing

Resistor, Brake RH-50

12-311200

Call for pricing

Ring, PVDF Slinger

03-230105

Call for pricing

Screw, QD Rotor Cap

03-180100

Call for pricing

Seal, 260 Door

09-112200

Call for pricing

Seal, 270 Door

09-113200

Call for pricing

Seal, 280 Door

09-114110

 

Seal, Ferrofluidic

14-100050

 

Seal, Labrinyth (non-contact)

15-170700

 

Seal, Rear Bowl (Model Brushed)

09-120105

 

Seal, Rear Bowl (Model Brushless)

09-120100

 

Spray Nozzles, High Flow DI

08-300200

 

Stop Positioner, Rotor
(RSP/Indexer) 240-270

10-114100

 

Stop Positioner, Rotor
(RSP/Indexer) 280-2300

10-114120

 

Switch Assembly, Start

12-421-200

 

Switch Assembly, Stop

12-421-205

 

Valve, 2-stage DI Teflon/PVC

10-112110

 

Valve, 2-stage N2Teflon/PVC

10-112100

 

Valve, 3-stage DITeflon/PVC

10-112120

 

Valve, 24V "S" Solenoid

10-122105

 

Valve, 120V "F" Manifold Mount Solenoid

10-122110

 

Window, 2300 Universal 8 hole

03-141230

 

Window, 260 Left Hinge

00-321120

 

Window, 260 Right Hinge

03-211210

 

Window, 260 Universal Thick lipped

03-211116

 

Window, 270 Universal

03-211315

 

Window, 270 Left Hinge

03-211305

 

Window, 270 Right Hinge

03-211310

 

Window, 280 Universal 6-hole

03-211400

 
 

Additional Services Available:

 

Rotor Re-balancing and
electro-Polishing

21-350100

Call for pricing

Bowl, Hand Polishing (to RA-10 Finish)

21-RA1000

Call for pricing

Bowl, Electropolish Only
(customer to disassemble SRD
send bowl only to M Tek for EP)

21-EP1000

Call for pricing

Hub Repair and Balance

21-35100

Call for pricing

Bowls & Repairs

 

Bowl, 260

04-122100

Call for pricing

Bowl, 270

04-132105

Call for pricing

Bowl, 280

04-142100

Call for pricing

Rotors & Repairs

 

Rotor, 4-Bolt, any size 1” to 6”

19-100000

Call for pricing

Rotor, Single Bolt
(Quick Disconnect) 1” - 6”

19-127000

Call for pricing

Rotor, Single Bolt
(Quick Disconnect) 8”

19-124000

Call for pricing

Rotor, Single Bolt
(Quick Disconnect)
12” w/cacassette

19-125000

Call for pricing
Controllers & Repairs
 

Controller, 328 Brushed Repair

21-328100

Call for pricing

Controller, 101 Model Repair

21-101100

Call for pricing

Controller, 102 Model Repair

21-102100

Call for pricing

Controller, 102 Brush-less Model

13-113210

Call for pricing

Controller, Model 328 Brushed

13-112410

Call for pricing

Controller, Motor, LC-4 Model (New)

13-113310

Call for pricing

Rotor Tach Boards (assembly only)

12-341100

Call for pricing

Static Eliminator

12-640100

Call for pricing

Resistivity Probe

12-740100

 

 

Call for pricing

........
© 2005 M Tek Corporation
webmaster@m-tekcorp.com

M TEK CORPORATION
AUBURN, CALIFORNIA USA

more information:
mtekcorp@aol.com